CVD graphene on Si wafer

Size : 2~8 inch wafer

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CVD graphene on Si wafer

Size : 2~8 inch wafer

Click on the image below to view the relevant image larger.

Information of graphene


Growth method
Thermal CVD synthesis
Transfer method
Vacuum transfer
(Patent : Korea/10-1899224, PCT/KR2015/000085)
Effective transfer area
Over 90% of wafer
Quality Control
Optical Microscopy and Raman measurement
(Raman 2D/G area ratio > 4)

Graphene morphology
Continuous Monolayer ( > 95%)
Thickness (theoretical)
0.345nm
Grain size
Up to 20㎛

Information of substrate


Substrate
SiO₂/Si wafer
- SiO₂ thickness : 90nm, 300nm
- Si wafer : <100>, Highly P-dopped (resistivity < 0.005Ωㆍ㎝)

Electrical performances


Sheet ResistanceAverage > 700Ω/□  (without gate bias)
Field effect mobility> 2000 ㎠/Vㆍs (back gate Graphene FET)
On/off ratio> 8 (back gate Graphene FET)

Reference

  • S.Lee†, S.K.Lee†, et al., “Graphene transfer in vacuum yielding a high quality graphene”, Carbon, 93, 2015, p.286-294.
  • 등록 특허, 10-1899224, 진공 열처리를 이용한 그래핀 전사 방법 및 그래핀 전사 장치
  • 국제 출원, PCT/KR2015/000085, Method for transferring graphene using vacuum annealing and apparatus for transferring graphene


Optical microscopy image after transfer


Raman Spectrum


Standard normal distribution


Uniformity of sheet resistance

Certificate

  • Certified by Korea Sensor Lab. 
  • Content : Sheet resistance uniformity of
           transferred graphene
  • Results
    • Average sheet resistance
      : 700Ω/□ (without gate bias)
    • standard deviation ~110

Comparison of graphene
qualities transferred
by various transfer methods 

Vacuum transfer (Alpha Graphene Inc.) 


Wet transfer 


Conventional dry transfer 


Alpha Graphene Inc.

#403, Business Innovation Center for Advanced Technology, 77, Cheongam-ro, Nam-gu, Pohang-si, Gyeongsangbuk-do, Republic of Korea


TEL  +82-54-727-0822

FAX  +82-54-279-5029

Support@alphagraphene.com


ⓒ 2023 ALPHAGRAPHENE. All Rights Reserved.

Alpha Graphene Inc.

#403, Business Innovation Center for Advanced Technology, 77,

Cheongam-ro, Nam-gu, Pohang-si, Gyeongsangbuk-do, Republic of Korea


TEL  +82-54-727-0822

FAX  +82-54-279-5029

Support@alphagraphene.com


ⓒ 2023 ALPHAGRAPHENE. All Rights Reserved.